Chemical Vapor Deposition is widely used in research and development laboratories, especially for the synthesis of carbon nanostructures of graphene, vertically aligned carbon nanotubes or silicon nano wires. Oerlikon Leybold Vacuum now offers one of the most compact thermal CVD reactors on the market, specially designed to meet the needs of research laboratories while adopting the highest safety standards. Opto-electric properties of graphene have proved to be extremely dependent on targeted substrate, therefore, dielectrics/graphene systems capable of emulating suspended graphene properties while overcoming intrinsic difficulties of these suspended samples are a hot topic among the rapidly evolving nanotechnology field. For these experimental studies, the Oerlikon Leybold Vacuum bench top Thermal CVD reactor has been successfully used. The system allows to sequentially program each reaction step through its CVD Express software at ease.