Busch’s Fossa scroll vacuum pump

Vacuum pump, blower and vacuum systems manufacturer Busch has launched a new scroll vacuum pump, the Fossa FO 0015 A. The Fossa is a hermetic sealed, completely dry-compressing vacuum pump which is suitable for a wide range of specialist applications. These include the handling of noble gases, helium leak detectors, laboratories and R & D, analytical devices, mass spectrometers and electron microscopes. A key sector for Fossa is in the semiconductor industry, where it is used for the evacuation of load locks and transfer chambers. Other general industrial applications include the handling and transport of inert gases, plasma cleaning machines and coating machines. When used in conjunction with a turbomolecular vacuum pump, the Fossa provides a completely dry vacuum for use in high vacuum applications.

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